Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488755 | Pattern forming method, photo mask manufacturing method, and electronic device manufacturing method | Shuji Hirano, Akira Takada | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488755 | Pattern forming method, photo mask manufacturing method, and electronic device manufacturing method | Shuji Hirano, Akira Takada | 2019-11-26 |