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Tetsuji Togawa

EB Ebara: 4 patents #16 of 164Top 10%
Overall (2019): #42,481 of 560,194Top 8%
4
Patents 2019

Issued Patents 2019

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10493588 Polishing apparatus and polishing method Masaya Seki, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida 2019-12-03
10343252 Polishing apparatus for detecting abnormality in polishing of a substrate Masaya Seki, Hiroyuki Takenaka 2019-07-09
10307882 Method and apparatus for polishing a substrate Makoto Fukushima, Shingo Togashi, Tomoshi Inoue 2019-06-04
10293455 Polishing apparatus Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda 2019-05-21