Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10493588 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida | 2019-12-03 |
| 10343252 | Polishing apparatus for detecting abnormality in polishing of a substrate | Masaya Seki, Hiroyuki Takenaka | 2019-07-09 |
| 10307882 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Togashi, Tomoshi Inoue | 2019-06-04 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2019-05-21 |