Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10493588 | Polishing apparatus and polishing method | Tetsuji Togawa, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida | 2019-12-03 |
| 10414013 | Polishing method and polishing apparatus | Manao Hoshina | 2019-09-17 |
| 10403505 | Substrate processing method and substrate processing apparatus | Kenya Ito, Kenichi Kobayashi, Michiyoshi YAMASHITA | 2019-09-03 |
| 10343252 | Polishing apparatus for detecting abnormality in polishing of a substrate | Tetsuji Togawa, Hiroyuki Takenaka | 2019-07-09 |
| 10166647 | Polishing apparatus and polishing method | Tamami Takahashi, Hiroaki Kusa, Kenji Yamaguchi, Masayuki Nakanishi | 2019-01-01 |