Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486284 | Substrate holding device, and substrate polishing apparatus | Shingo Togashi, Makoto Fukushima, Osamu Nabeya | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Keisuke Namiki, Osamu Nabeya, Makoto Fukushima | 2019-10-15 |
| 10414015 | Polishing apparatus and polishing method | Makoto Fukushima, Shingo Togashi | 2019-09-17 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-08-27 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2019-05-21 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |