Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2019-11-26 |
| 10486284 | Substrate holding device, and substrate polishing apparatus | Shingo Togashi, Hozumi Yasuda, Makoto Fukushima | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Keisuke Namiki, Hozumi Yasuda, Makoto Fukushima | 2019-10-15 |
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Tomoko Owada | 2019-09-10 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Shingo Togashi +1 more | 2019-08-27 |
| 10293455 | Polishing apparatus | Tetsuji Togawa, Makoto Fukushima, Hozumi Yasuda | 2019-05-21 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Tomoko Owada +1 more | 2019-01-29 |