Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486284 | Substrate holding device, and substrate polishing apparatus | Shingo Togashi, Hozumi Yasuda, Osamu Nabeya | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Keisuke Namiki, Hozumi Yasuda, Osamu Nabeya | 2019-10-15 |
| 10414015 | Polishing apparatus and polishing method | Hozumi Yasuda, Shingo Togashi | 2019-09-17 |
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada | 2019-09-10 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-08-27 |
| 10307882 | Method and apparatus for polishing a substrate | Tetsuji Togawa, Shingo Togashi, Tomoshi Inoue | 2019-06-04 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2019-05-21 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2019-01-29 |