Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410901 | Electrostatic chuck table using method | Kenji Furuta, Sakae Matsuzaki | 2019-09-10 |
| 10249547 | Method for using a test wafer by forming modified layer using a laser beam and observing damage after forming modified layer | Satoshi Kobayashi, Shunsuke Teranishi, Nobumori Ogoshi, Atsushi Ueki, Yasuhiro Shimma | 2019-04-02 |