Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490450 | Electrostatic chuck table | Sakae Matsuzaki, Noriko Ito, Ken Togashi | 2019-11-26 |
| 10410901 | Electrostatic chuck table using method | Yuriko Sato, Sakae Matsuzaki | 2019-09-10 |