Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490450 | Electrostatic chuck table | Sakae Matsuzaki, Noriko Ito, Kenji Furuta | 2019-11-26 |
| 10242904 | Transfer apparatus, processing apparatus, and transfer method | Masahiro Tsukamoto | 2019-03-26 |