Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490450 | Electrostatic chuck table | Noriko Ito, Ken Togashi, Kenji Furuta | 2019-11-26 |
| 10410901 | Electrostatic chuck table using method | Kenji Furuta, Yuriko Sato | 2019-09-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490450 | Electrostatic chuck table | Noriko Ito, Ken Togashi, Kenji Furuta | 2019-11-26 |
| 10410901 | Electrostatic chuck table using method | Kenji Furuta, Yuriko Sato | 2019-09-10 |