Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401732 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Rafael C. Howell, Yi-Fan Chen | 2019-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401732 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Rafael C. Howell, Yi-Fan Chen | 2019-09-03 |