Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459346 | Flows of optimization for lithographic processes | Duan-Fu Stephen Hsu, Xiaofeng Liu | 2019-10-29 |
| 10401732 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Xinjian Zhou, Yi-Fan Chen | 2019-09-03 |
| 10191384 | Discrete source mask optimization | Xiaofeng Liu | 2019-01-29 |