Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497573 | Selective atomic layer etching of semiconductor materials | Prerna Goradia, Fei Wang, Geetika Bajaj, Nitin K. Ingle, Zihui Li +1 more | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497573 | Selective atomic layer etching of semiconductor materials | Prerna Goradia, Fei Wang, Geetika Bajaj, Nitin K. Ingle, Zihui Li +1 more | 2019-12-03 |