Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10410845 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Usama Dadu, Wonseok Lee, Daisuke Shimizu, Li Ling, Kevin Choi | 2019-09-10 |