Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410845 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Kenny L. Doan, Usama Dadu, Wonseok Lee, Li Ling, Kevin Choi | 2019-09-10 |
| 10253416 | Surface treatment agent for metal material and production method for surface-treated metal material | Eisuke Kudo, Yoshikazu NAMAI | 2019-04-09 |