Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410845 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Kenny L. Doan, Usama Dadu, Wonseok Lee, Daisuke Shimizu, Li Ling | 2019-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410845 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Kenny L. Doan, Usama Dadu, Wonseok Lee, Daisuke Shimizu, Li Ling | 2019-09-10 |