Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074519 | Plasma processing apparatus and filter unit | Masaki Nishikawa, Naohiko Okunishi, Junichi Shimada, Ken Koyanagi | 2018-09-11 |
| 10056230 | Power supply system, plasma processing apparatus and power supply control method | Taichi Hirano, Junji Ishibashi, Kunihiro Sato | 2018-08-21 |