Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115567 | Plasma processing apparatus | Taichi Hirano, Ken Yoshida, Hikoichiro Sasaki, Satoshi Yamada, Yoshinobu Hayakawa +1 more | 2018-10-30 |
| 10056230 | Power supply system, plasma processing apparatus and power supply control method | Taichi Hirano, Keiki Ito, Kunihiro Sato | 2018-08-21 |