Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115567 | Plasma processing apparatus | Ken Yoshida, Hikoichiro Sasaki, Satoshi Yamada, Yoshinobu Hayakawa, Junji Ishibashi +1 more | 2018-10-30 |
| 10056230 | Power supply system, plasma processing apparatus and power supply control method | Junji Ishibashi, Keiki Ito, Kunihiro Sato | 2018-08-21 |
| 9922802 | Power supply system, plasma etching apparatus, and plasma etching method | Fumitoshi Kumagai | 2018-03-20 |
| 9893475 | Connector system capable of mitigating signal deterioration | Kazuaki Toba, Akira Matsuda | 2018-02-13 |