Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115567 | Plasma processing apparatus | Taichi Hirano, Ken Yoshida, Hikoichiro Sasaki, Satoshi Yamada, Yoshinobu Hayakawa +1 more | 2018-10-30 |
| 9922802 | Power supply system, plasma etching apparatus, and plasma etching method | Taichi Hirano | 2018-03-20 |