Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096454 | Plasma processing apparatus | Nozomu Nagashima | 2018-10-09 |
| 10074519 | Plasma processing apparatus and filter unit | Keiki Ito, Masaki Nishikawa, Junichi Shimada, Ken Koyanagi | 2018-09-11 |