Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074519 | Plasma processing apparatus and filter unit | Keiki Ito, Masaki Nishikawa, Naohiko Okunishi, Ken Koyanagi | 2018-09-11 |
| 10008426 | Etching method and etchant | Takehiro Nakai, Norihiko Tsuchiya, Sakae Funo, Youko Itabashi | 2018-06-26 |