Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115614 | Transfer chamber and method for preventing adhesion of particle | Junji Oikawa, Hiroyuki Nakayama | 2018-10-30 |
| 9997332 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Chishio Koshimizu | 2018-06-12 |
| 9941097 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Kazuki Denpoh | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Kazuki Denpoh | 2018-02-20 |