Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020167 | Plasma processing apparatus | — | 2018-07-10 |
| 9997332 | Plasma processing apparatus and plasma processing method | Masashi Saito, Kazuki Denpoh, Chishio Koshimizu, Jun Yamawaku | 2018-06-12 |
| 9953811 | Plasma processing method | — | 2018-04-24 |
| 9941097 | Plasma processing apparatus | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-02-20 |