Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997332 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-06-12 |
| 9952032 | Temperature measuring method, substrate processing system and component to be provided in substrate processing apparatus of the substrate processing system | Tatsuo Matsudo | 2018-04-24 |
| 9941097 | Plasma processing apparatus | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-02-20 |