Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997332 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Chishio Koshimizu, Jun Yamawaku | 2018-06-12 |
| 9941097 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku | 2018-02-20 |