Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115614 | Transfer chamber and method for preventing adhesion of particle | Jun Yamawaku, Hiroyuki Nakayama | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115614 | Transfer chamber and method for preventing adhesion of particle | Jun Yamawaku, Hiroyuki Nakayama | 2018-10-30 |