Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053773 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Eiichi Nishimura | 2018-08-21 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Seishi Murakami, Takashi Sakuma, Masahiko Tomita, Takamichi Kikuchi +2 more | 2018-05-29 |
| 9882124 | Etching method and substrate processing apparatus | Eiichi Nishimura, Fumiko Yamashita | 2018-01-30 |