Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053773 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Eiichi Nishimura, Akitaka Shimizu | 2018-08-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053773 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Eiichi Nishimura, Akitaka Shimizu | 2018-08-21 |