Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074800 | Method for etching magnetic layer including isopropyl alcohol and carbon dioxide | Shigeru Tahara | 2018-09-11 |
| 10053773 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Akitaka Shimizu | 2018-08-21 |
| 9882124 | Etching method and substrate processing apparatus | Akitaka Shimizu, Fumiko Yamashita | 2018-01-30 |
| 9859102 | Method of etching porous film | Shigeru Tahara, Mikhail Baklanov, Liping Zhang, Jean-Francois de Marneffe | 2018-01-02 |