Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103011 | Plasma processing method and plasma processing apparatus | Jisoo SUH | 2018-10-16 |
| 10053773 | Method of cleaning plasma processing apparatus | Mitsuru Hashimoto, Keiichi Shimoda, Eiichi Nishimura, Akitaka Shimizu | 2018-08-21 |