Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096548 | Method of manufacturing Cu wiring | Kenji Matsumoto, Tadahiro Ishizaka, Peng Chang, Osamu Yokoyama, Hiroyuki Nagai | 2018-10-09 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Seishi Murakami, Masahiko Tomita, Takamichi Kikuchi, Akitaka Shimizu +2 more | 2018-05-29 |