Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163676 | Apparatus and system for preventing backside peeling defects on semiconductor wafers | Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Chang-Sheng Lee, Wei-Chen Liao +1 more | 2018-12-25 |
| 10163626 | Metal gate structure and manufacturing method thereof | Ming-Huei Lin, Chih-Pin Tsao, Shih-Hsun Chang | 2018-12-25 |
| 10113228 | Method for controlling semiconductor deposition operation | Chung-Liang Cheng, Sheng-Wei Yeh, Chia-Hsi Wang, Wei-Jen Chen, Chang-Sheng Lee +1 more | 2018-10-30 |
| 10074547 | Photoresist nozzle device and photoresist supply system | Kuo-Shu Tseng, You-Feng CHEN | 2018-09-11 |
| 10043908 | Contact structure of semiconductor device | Clement Hsingjen Wann, Ling-Yen Yeh, Chi-Yuan Shih | 2018-08-07 |
| 9922976 | Semiconductor device and manufacturing method thereof | Ming-Huei Lin, Chih-Pin Tsao, Shih-Hsun Chang | 2018-03-20 |
| 9892982 | Method for controlling exhaust flow in wafer processing module | Kuo-Shu Tseng, Chien-Hua Chen, You-Feng CHEN, Zhong Chen, Yung-Haw Liaw | 2018-02-13 |