Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074547 | Photoresist nozzle device and photoresist supply system | Kuo-Shu Tseng, Yen-Yu Chen | 2018-09-11 |
| 9919350 | Cup-wash device, semiconductor apparatus, and cup cleaning method | Kuo-Shu Tseng, Chih-Hsien Hung, Cheng-Yi Lin, Yao-Yuan SHANG | 2018-03-20 |
| 9892982 | Method for controlling exhaust flow in wafer processing module | Kuo-Shu Tseng, Chien-Hua Chen, Yen-Yu Chen, Zhong Chen, Yung-Haw Liaw | 2018-02-13 |