Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892982 | Method for controlling exhaust flow in wafer processing module | Kuo-Shu Tseng, Chien-Hua Chen, You-Feng CHEN, Yen-Yu Chen, Zhong Chen | 2018-02-13 |
YL
Yung-Haw Liaw
Overall (2018): #178,009 of 503,207Top 40%
1
Patents 2018