Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163676 | Apparatus and system for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Wei-Chen Liao +1 more | 2018-12-25 |
| 10113228 | Method for controlling semiconductor deposition operation | Chung-Liang Cheng, Sheng-Wei Yeh, Chia-Hsi Wang, Wei-Jen Chen, Yen-Yu Chen +1 more | 2018-10-30 |