Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160639 | Semiconductor structure for MEMS Device | Yu-Chia Liu, Chia-Hua Chu, Chun-Wen Cheng | 2018-12-25 |
| 10155244 | Fluid deposition appartus and method | Chun-Wen Cheng, Yi-Shao Liu, Fei-Lung Lai, Shang-Ying Tsai | 2018-12-18 |
| 10046965 | CMOS-MEMS structure and method of forming the same | Chia-Hua Chu, Fei-Lung Lai, Shiang-Chi Lin | 2018-08-14 |
| 9998843 | Method for manufacturing a microphone | Chia-Hua Chu, Chun-Wen Cheng, Chin-Yi Cho, Li-Min Hung, Yao-Te Huang | 2018-06-12 |
| 9950522 | MEMS devices and methods of fabrication thereof | Chun-Ren Cheng, Jiou-Kang Lee, Shang-Ying Tsai, Ting-Hau Wu | 2018-04-24 |
| 9938134 | Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device | Shiang-Chi Lin, Yu-Chia Liu, Yi-Chien Wu, Wei Tan | 2018-04-10 |
| 9919914 | MEMS devices including MEMS dies and connectors thereto | Chun-Wen Cheng, Shang-Ying Tsai, Hung-Chia Tsai, Yi-Chuan Teng | 2018-03-20 |