Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938134 | Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device | Shiang-Chi Lin, Jung-Huei Peng, Yu-Chia Liu, Yi-Chien Wu | 2018-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938134 | Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device | Shiang-Chi Lin, Jung-Huei Peng, Yu-Chia Liu, Yi-Chien Wu | 2018-04-10 |