Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160639 | Semiconductor structure for MEMS Device | Chia-Hua Chu, Chun-Wen Cheng, Jung-Huei Peng | 2018-12-25 |
| 9944513 | Micro-electro-mechanical device having low thermal expansion difference | Ming-Han Tsai, Wei-Leun Fang | 2018-04-17 |
| 9938134 | Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device | Shiang-Chi Lin, Jung-Huei Peng, Yi-Chien Wu, Wei Tan | 2018-04-10 |
| 9868628 | Method and structure for CMOS-MEMS thin film encapsulation | Chia-Hua Chu, Chun-Wen Cheng | 2018-01-16 |