Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10046965 | CMOS-MEMS structure and method of forming the same | Jung-Huei Peng, Chia-Hua Chu, Fei-Lung Lai | 2018-08-14 |
| 10035700 | Semiconductor structure and manufacturing method thereof | Chun-Wen Cheng, Chia-Hua Chu, Fei-Lung Lai | 2018-07-31 |
| 9938134 | Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device | Jung-Huei Peng, Yu-Chia Liu, Yi-Chien Wu, Wei Tan | 2018-04-10 |