Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145371 | Ultra high vacuum cryogenic pumping apparatus with nanostructure material | Surendra Babu Anantharaman, Wen-Cheng Yang, Victor Lu, Wei-Kuo Chin | 2018-12-04 |
| 10121698 | Method of manufacturing a semiconductor device | Hsiang-Huan Lee, Shau-Lin Shue, Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2018-11-06 |
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Chih-Tsung Lee, Hung Jui Chang, You-Hua Chou, Shiu-Ko JangJian, Ming-Chin Tsai +1 more | 2018-05-29 |
| 9865478 | Shielding design for metal gap fill | Ming-Chin Tsai, Bo-Hung Lin, You-Hua Chou | 2018-01-09 |