Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Hung Jui Chang, You-Hua Chou, Shiu-Ko JangJian, Chung-En Kao, Ming-Chin Tsai +1 more | 2018-05-29 |
| 9976215 | Semiconductor film formation apparatus and process | You-Hua Chou, Shu-Fen Wu, Chin-Hsiang Lin | 2018-05-22 |