Issued Patents 2018
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160721 | Salt and photoresist composition containing the same | Isao Yoshida | 2018-12-25 |
| 10126650 | Resist composition | Takayuki Miyagawa, Kaoru Araki | 2018-11-13 |
| 10073343 | Non-ionic compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Yuichi Mukai | 2018-09-11 |
| 10047046 | Salt and photoresist composition containing the same | Tatsuro Masuyama, Natsuki Okada | 2018-08-14 |
| 9996002 | Resin, resist composition and method for producing resist pattern | Takashi Nishimura, Shota NAKANO | 2018-06-12 |
| 9983478 | Resin, resist composition and method for producing resist pattern | Masahiko Shimada, Yuki SUZUKI | 2018-05-29 |
| 9971241 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Yuki SUZUKI | 2018-05-15 |
| 9951159 | Compound, resin, resist composition and method for producing resist pattern | Yukako Anryu, Singo Fujita | 2018-04-24 |
| 9880466 | Salt, acid generator, resin, resist composition and method for producing resist pattern | Takashi Nishimura | 2018-01-30 |
| 9869930 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Yuichi Mukai | 2018-01-16 |
| 9869929 | Resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Yuki SUZUKI | 2018-01-16 |
| 9857683 | Compound, resin, resist composition and method for producing resist pattern | Mitsuyoshi Ochiai, Shota NAKANO | 2018-01-02 |