Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073343 | Non-ionic compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-09-11 |
| 9869930 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-01-16 |