Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073343 | Non-ionic compound, resin, resist composition and method for producing resist pattern | Yuichi Mukai, Koji Ichikawa | 2018-09-11 |
| 10047046 | Salt and photoresist composition containing the same | Natsuki Okada, Koji Ichikawa | 2018-08-14 |
| 9971241 | Compound, resin, resist composition and method for producing resist pattern | Yuki SUZUKI, Koji Ichikawa | 2018-05-15 |
| 9869929 | Resin, resist composition and method for producing resist pattern | Yuki SUZUKI, Koji Ichikawa | 2018-01-16 |
| 9869930 | Compound, resin, resist composition and method for producing resist pattern | Yuichi Mukai, Koji Ichikawa | 2018-01-16 |