Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147625 | Gas floated workpiece supporting apparatus and noncontact workpiece support method | Sadao Tanigawa | 2018-12-04 |
| 10032892 | Semiconductor device | Hiromichi Ohta, Takayoshi Katase | 2018-07-24 |
| 9983478 | Resin, resist composition and method for producing resist pattern | Masahiko Shimada, Koji Ichikawa | 2018-05-29 |
| 9971241 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-05-15 |
| 9869929 | Resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-01-16 |