Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101657 | Resin, resist composition and method for producing resist pattern | Masako Sugihara | 2018-10-16 |
| 9996002 | Resin, resist composition and method for producing resist pattern | Shota NAKANO, Koji Ichikawa | 2018-06-12 |
| 9880466 | Salt, acid generator, resin, resist composition and method for producing resist pattern | Koji Ichikawa | 2018-01-30 |