Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134610 | Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate | Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Masakazu Sanada | 2018-11-20 |
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yukihiko Inagaki, Koji Kaneyama | 2018-08-14 |
| 10042262 | Negative developing method and negative developing apparatus | Koji Kaneyama | 2018-08-07 |
| 9972516 | Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method | Koji Nishi, Toru Momma | 2018-05-15 |