Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144033 | Substrate processing apparatus and substrate processing method | Masanori IMAMURA, Hidetoshi Sagawa, Yoshinori Tawaratani, Masaaki Furukawa | 2018-12-04 |
| 10134610 | Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate | Tadashi Miyagi, Kazuhito Shigemori, Shuichi Yasuda, Masakazu Sanada | 2018-11-20 |
| 9937520 | Substrate treating method | Takehiro Wajiki, Shinichi Takada | 2018-04-10 |