Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Yukihiko Inagaki | 2018-08-14 |
| 10042262 | Negative developing method and negative developing apparatus | Tadashi Miyagi | 2018-08-07 |